A guide to hands-on MEMS design and prototyping
(eBook)
Author
Contributors
Published
Cambridge ; New York : Cambridge University Press, 2011.
Physical Desc
xi, 166 pages : col. ill.
Status
More Details
Format
eBook
Language
English
Notes
Bibliography
Includes bibliographical references and index.
Description
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--,Provided by publisher.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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Citations
APA Citation, 7th Edition (style guide)
Kubby, J. A. (2011). A guide to hands-on MEMS design and prototyping . Cambridge University Press.
Chicago / Turabian - Author Date Citation, 17th Edition (style guide)Kubby, Joel A. 2011. A Guide to Hands-on MEMS Design and Prototyping. Cambridge University Press.
Chicago / Turabian - Humanities (Notes and Bibliography) Citation, 17th Edition (style guide)Kubby, Joel A. A Guide to Hands-on MEMS Design and Prototyping Cambridge University Press, 2011.
MLA Citation, 9th Edition (style guide)Kubby, Joel A. A Guide to Hands-on MEMS Design and Prototyping Cambridge University Press, 2011.
Note! Citations contain only title, author, edition, publisher, and year published. Citations should be used as a guideline and should be double checked for accuracy. Citation formats are based on standards as of August 2021.
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Grouped Work ID
bcb9bfb9-6216-4863-45f2-ee68d1ad9df1-eng
Grouping Information
| Grouped Work ID | bcb9bfb9-6216-4863-45f2-ee68d1ad9df1-eng |
|---|---|
| Full title | guide to hands on mems design and prototyping |
| Author | kubby joel a |
| Grouping Category | book |
| Last Update | 2022-06-07 21:23:19PM |
| Last Indexed | 2024-05-18 05:09:45AM |
Book Cover Information
| Image Source | default |
|---|---|
| First Loaded | Apr 7, 2023 |
| Last Used | Feb 16, 2024 |
Marc Record
| First Detected | Aug 09, 2021 01:44:56 PM |
|---|---|
| Last File Modification Time | Nov 22, 2021 09:39:23 AM |
MARC Record
| LEADER | 02915nam a2200433 a 4500 | ||
|---|---|---|---|
| 001 | EBC775091 | ||
| 003 | MiAaPQ | ||
| 006 | m E | | ||
| 007 | cr cn||||||||| | ||
| 008 | 110209s2011 enka sb 001 0 eng d | ||
| 010 | |z 2011004247 | ||
| 020 | |z 9780521889254 (hardback) | ||
| 020 | |z 9781107645790 (pbk.) | ||
| 020 | |z 9781139114257 (e-book) | ||
| 035 | |a (Sirsi) EBC775091 | ||
| 035 | |a (Sirsi) EBC775091 | ||
| 035 | |a (MiAaPQ)EBC775091 | ||
| 035 | |a (Au-PeEL)EBL775091 | ||
| 035 | |a (CaPaEBR)ebr10502663 | ||
| 035 | |a (CaONFJC)MIL329560 | ||
| 035 | |a (OCoLC)759114739 | ||
| 040 | |a MiAaPQ|c MiAaPQ|d MiAaPQ | ||
| 050 | 4 | |a TK7875|b .K83 2011 | |
| 082 | 0 | 4 | |a 621.381|2 22 |
| 100 | 1 | |a Kubby, Joel A. | |
| 245 | 1 | 2 | |a A guide to hands-on MEMS design and prototyping|h [eBook] /|c Joel Kubby. |
| 260 | |a Cambridge ;|a New York :|b Cambridge University Press,|c 2011. | ||
| 300 | |a xi, 166 p. :|b col. ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 8 | |a Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics. | |
| 520 | |a "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--|c Provided by publisher. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 655 | 4 | |a Electronic books. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u http://ebookcentral.proquest.com/lib/yavapai-ebooks/detail.action?docID=775091|x Yavapai College|y Yavapai College users click here to access |
| 856 | 4 | 0 | |u http://ebookcentral.proquest.com/lib/prescottcollege-ebooks/detail.action?docID=775091|x Prescott College|y Prescott College users click here to access |
| 856 | 4 | 0 | |u http://ebookcentral.proquest.com/lib/yln-ebooks/detail.action?docID=775091|x Yavapai Library Network|y All other users click here to access |
| 945 | |a E-Book | ||
